A plasma processor is a device used for plasma processing. Its structure consists of the following main components:
Discharge chamber: The discharge chamber is the core component of a plasma processor. It uses high AC voltage or radio frequency electric fields to cause gas discharges, thereby forming plasma. The discharge chamber is typically made of insulating materials such as ceramic or glass.
Working chamber: The working chamber is the primary location for material processing. Different processing effects are achieved by controlling different gas, pressure, and power parameters. The working chamber is typically made of materials with good vacuum sealing properties, such as metal or ceramic.
Evacuation system: The vacuum system is used to extract the gas from the working chamber to create a vacuum environment during the processing. The vacuum system typically consists of a vacuum pump and related control system.
High-frequency power supply: The high-frequency power supply provides energy to the plasma processor, ionizing the gas to form plasma through a high-frequency electric field. The high-frequency power supply typically consists of electronic components and related control systems.
Automatic control system: The automatic control system controls the entire plasma processing process, including parameter setting, processing time control, and vacuum level monitoring. The automatic control system typically consists of a computer and related control software.
In addition, plasma processors are equipped with a gas supply system to supply the necessary gases to the discharge chamber. This system typically consists of a gas cylinder, a pressure regulator, a flow controller, and other components.
In summary, the structure of a plasma processor includes the discharge chamber, a working chamber, a vacuum system, a high-frequency power supply, and an automatic control system. The coordinated operation of these components enables the plasma processor to induce various physical and chemical reactions on the material surface, thereby achieving the desired treatment.